The Japan Society of Applied Physics

[K-2-4] Integrating carbon nanotubes as vias in a monolithic 3DIC process

S. Vollebregt1、R. Ishihara1、A.N. Chiaramonti2、J. Bin Abdul Jalil1、K. Beenakker1 (1.Delft Univ. of Tech. , The Netherlands、2.National Inst. of Standards and Tech. , United States of America)

https://doi.org/10.7567/SSDM.2012.K-2-4