[K-5-1] Thermal and Mechanical Stress in High-Density 3D-LSIs

M. Murugesan¹、H. Kobayashi²、T. Fukushima¹、T. Tanaka¹、M. Koyanagi¹ (1.Tohoku Univ.、2.ASET , Japan)

https://doi.org/10.7567/SSDM.2012.K-5-1