[K-5-1] Thermal and Mechanical Stress in High-Density 3D-LSIs

M. Murugesan¹, H. Kobayashi², T. Fukushima¹, T. Tanaka¹, M. Koyanagi¹ (1.Tohoku Univ., 2.ASET , Japan)

https://doi.org/10.7567/SSDM.2012.K-5-1