[L-2-1] X-Ray Three-Dimensional Topography Analysis of Basal-Plane Dislocations and Threading Edge Dislocations in 4H-SiC

R. Tanuma¹、D. Mori²、I. Kamata¹、H. Tsuchida¹ (1.Central Res. Inst. Electric Power Indus. (CRIEPI)、2.Fuji Electric Co., Ltd. , Japan)

https://doi.org/10.7567/SSDM.2012.L-2-1