[L-2-1] X-Ray Three-Dimensional Topography Analysis of Basal-Plane Dislocations and Threading Edge Dislocations in 4H-SiC
R. Tanuma1, D. Mori2, I. Kamata1, H. Tsuchida1
(1.Central Res. Inst. Electric Power Indus. (CRIEPI), 2.Fuji Electric Co., Ltd. , Japan)
https://doi.org/10.7567/SSDM.2012.L-2-1
