[PS-1-2] Interfacial Reaction Mechanism in Al2O3/Ge Structure by Oxygen Radical

K. Kato^1,2, S. Shibayama¹, M. Sakashita¹, W. Takeuchi¹, N. Taoka¹, O. Nakatsuka¹, S. Zaima¹ (1.Nagoya Univ., 2.Research Fellow of JSPS , Japan)

https://doi.org/10.7567/SSDM.2012.PS-1-2