[PS-1-2] Interfacial Reaction Mechanism in Al2O3/Ge Structure by Oxygen Radical

K. Kato^1,2、S. Shibayama¹、M. Sakashita¹、W. Takeuchi¹、N. Taoka¹、O. Nakatsuka¹、S. Zaima¹ (1.Nagoya Univ.、2.Research Fellow of JSPS , Japan)

https://doi.org/10.7567/SSDM.2012.PS-1-2