The Japan Society of Applied Physics

[PS-14-10] 3kV-class DIMOSFET on 4H-SiC (000-1)

H. Kono1,2, M. Furukawa1,2, K. Ariyoshi1,2, T. Suzuki1,2, Y. Tanaka1,3, T. Shinohe1,2 (1.R&D Partnership for Future Power Electronics Tech., 2.Corporate R&D Center, Toshiba Corp, 3.National Inst. of Advanced Industrial Science and Tech. , Japan)

https://doi.org/10.7567/SSDM.2012.PS-14-10