RF Inductors on Nanocrystalline Silicon Passivated HR-Si Substrates

R. L. Wang; Y. R. Lin; P. Y. Liu; C. J. Chen; Y. K. Su; T. J. Hsueh

doi:https://doi.org/10.7567/SSDM.2012.PS-2-10

2012 International Conference on Solid State Devices and Materials

Sep 25, 2012 - Sep 27, 2012
Kyoto International Conference Center, Kyoto, Japan

[PS-2-10] RF Inductors on Nanocrystalline Silicon Passivated HR-Si Substrates

R. L. Wang¹, Y. R. Lin¹, P. Y. Liu¹, C. J. Chen², Y. K. Su², T. J. Hsueh³ (1.National Kaohsiung Normal Univ., 2.National Cheng Kung Univ., 3.National Nano Device Labs. , Taiwan)

https://doi.org/10.7567/SSDM.2012.PS-2-10

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