The Japan Society of Applied Physics

[PS-2-10] RF Inductors on Nanocrystalline Silicon Passivated HR-Si Substrates

R. L. Wang1, Y. R. Lin1, P. Y. Liu1, C. J. Chen2, Y. K. Su2, T. J. Hsueh3 (1.National Kaohsiung Normal Univ., 2.National Cheng Kung Univ., 3.National Nano Device Labs. , Taiwan)

https://doi.org/10.7567/SSDM.2012.PS-2-10