[PS-3-29] Lifetime evaluation on AC stress in High-K / Metal-Gate with Using Dual-Pulsed-Test-System (DPTS)

H. Mori¹、Y. Ikeda¹、T. Kato¹、T. Uemura¹、H. Matsuyama¹ (1.FUJITSU SEMICONDUCTOR LTD. , Japan)

https://doi.org/10.7567/SSDM.2012.PS-3-29