The Japan Society of Applied Physics

[PS-6-12] Fabrication of AlGaN/GaN HEMTs with Slant Field Plates by Using Deep-UV Lithography

H. C. Wang1, Y. C. Lin1, C. C. Chang1, H. T. Hsu1, T. E. Shie1, L. C. Huang1, C. C. Chung1, E. Y. Chang1 (1.National Chiao-Tung Univ. , Taiwan)

https://doi.org/10.7567/SSDM.2012.PS-6-12