[PS-6-12] Fabrication of AlGaN/GaN HEMTs with Slant Field Plates by Using Deep-UV Lithography

H. C. Wang¹、Y. C. Lin¹、C. C. Chang¹、H. T. Hsu¹、T. E. Shie¹、L. C. Huang¹、C. C. Chung¹、E. Y. Chang¹ (1.National Chiao-Tung Univ. , Taiwan)

https://doi.org/10.7567/SSDM.2012.PS-6-12