[PS-6-12] Fabrication of AlGaN/GaN HEMTs with Slant Field Plates by Using Deep-UV Lithography

H. C. Wang¹, Y. C. Lin¹, C. C. Chang¹, H. T. Hsu¹, T. E. Shie¹, L. C. Huang¹, C. C. Chung¹, E. Y. Chang¹ (1.National Chiao-Tung Univ. , Taiwan)

https://doi.org/10.7567/SSDM.2012.PS-6-12