[PS-7-26L] Extraordinary Incident Angle Dependence of External Quantum Efficiency in SOI Photodiode with Silver Line-and-Space Grating

H. Satoh¹, K. Kawakubo¹, A. Ono¹, H. Inokawa¹ (1.Shizuoka Univ. , Japan)

https://doi.org/10.7567/SSDM.2012.PS-7-26L