[PS-7-3] Fabrication of Backside-Illuminated CMOS Compatible Photodiode for Optoelectronic Integrated Circuits

S. B. Shin¹, H. Okada¹, H. Sekiguchi¹, A. Wakahara¹ (1.Toyohashi Univ, of Tech. , Japan)

https://doi.org/10.7567/SSDM.2012.PS-7-3