[A-3-2] Chemical Vapor Deposition GeTe/Sb2Te3 Super-Lattice Phase Change Memory

M. Kitamura¹、T. Morikawa¹、T. Ohyanagi¹、M. Tai¹、M. Kinoshita¹、K. Akita¹、N. Takaura¹ (1.Low-power Electronics Association and Project (Japan))

https://doi.org/10.7567/SSDM.2013.A-3-2