Chemical Vapor Deposition GeTe/Sb2Te3 Super-Lattice Phase Change Memory

2013 International Conference on Solid State Devices and Materials

Sep 24, 2013 - Sep 27, 2013
Hilton Fukuoka Sea Hawk, Fukuoka, Japan

M. Kitamura¹, T. Morikawa¹, T. Ohyanagi¹, M. Tai¹, M. Kinoshita¹, K. Akita¹, N. Takaura¹ (1.Low-power Electronics Association and Project (Japan))