The Japan Society of Applied Physics

[B-5-1] Thermodynamic consideration and experimental demonstration for solving the problems of GeO2 solubility in H2O and GeO desorption from GeO2/Ge

C. Lu1,2, C.H. Lee1,2, W.F. Zhang1,2, T. Nishimura1,2, K. Nagashio1,2, A. Toriumi1,2 (1.Univ. of Tokyo, 2.JST-CREST (Japan))

https://doi.org/10.7567/SSDM.2013.B-5-1