[D-1-4] The Influence of Post-Etch InGaAs Fin Profile on Electrical Performance

Ts. Ivanov^1,2、A. Pourghaderi¹、D. Lin¹、J.K. Yu³、S. Tan³、K. Mikhaylich³、Y. Kimura³、D. Hellin⁴、J. Geypen¹、H. Bender¹、J. Vertommen⁴、G. Kamarthy³、N. Collaert¹、J. Marks³、V. Vahedi³、R. Arghavani³、A. Thean¹ (1.IMEC、2.KULeuven、3.Lam Res., USA、4.Lam Res., Belgium (Belgium))

https://doi.org/10.7567/SSDM.2013.D-1-4