[D-1-4] The Influence of Post-Etch InGaAs Fin Profile on Electrical Performance

Ts. Ivanov^1,2, A. Pourghaderi¹, D. Lin¹, J.K. Yu³, S. Tan³, K. Mikhaylich³, Y. Kimura³, D. Hellin⁴, J. Geypen¹, H. Bender¹, J. Vertommen⁴, G. Kamarthy³, N. Collaert¹, J. Marks³, V. Vahedi³, R. Arghavani³, A. Thean¹ (1.IMEC, 2.KULeuven, 3.Lam Res., USA, 4.Lam Res., Belgium (Belgium))

https://doi.org/10.7567/SSDM.2013.D-1-4