Bulk FinFET Fin Height Control using Gas Cluster Ion Beam (GCIB)-Location Specific Processing (LSP)

M.S. Kim; R. Ritzenthaler; J. Everaert; L. Fernandez; K. Devriendt; J.W. Lee; A. Redolfi; S. Mertens; E. Burke; N. Horiguchi; A. Thean

doi:https://doi.org/10.7567/SSDM.2013.D-2-2

[D-2-2] Bulk FinFET Fin Height Control using Gas Cluster Ion Beam (GCIB)-Location Specific Processing (LSP)

M.S. Kim¹、R. Ritzenthaler¹、J. Everaert¹、L. Fernandez²、K. Devriendt¹、J.W. Lee¹、A. Redolfi¹、S. Mertens¹、E. Burke²、N. Horiguchi¹、A. Thean¹ (1.IMEC、2.Tokyo Electron (Belgium))

https://doi.org/10.7567/SSDM.2013.D-2-2

2013 International Conference on Solid State Devices and Materials

[D-2-2] Bulk FinFET Fin Height Control using Gas Cluster Ion Beam (GCIB)-Location Specific Processing (LSP)