[D-2-3] New Observations on the Corner Effect and STI-Induced Effect in Trigate CMOS Devices

E.R. Hsieh¹, H.M. Tsai¹, S.S. Chung¹, C.H. Tsai², R.M. Huang², C.T. Tsai² (1.National Chiao Tung Univ., 2.UMC (Taiwan))

https://doi.org/10.7567/SSDM.2013.D-2-3