[D-2-3] New Observations on the Corner Effect and STI-Induced Effect in Trigate CMOS Devices

E.R. Hsieh¹、H.M. Tsai¹、S.S. Chung¹、C.H. Tsai²、R.M. Huang²、C.T. Tsai² (1.National Chiao Tung Univ.、2.UMC (Taiwan))

https://doi.org/10.7567/SSDM.2013.D-2-3