[D-3-4] Effect of Alloy Scattering on Hole Mobility of sSi/sSiGe/sSOI Quantum Well pMOSFETs

W. Wu¹, W. Yu², Q. Zhao³, J. Sun¹, D. Zhai¹, Y. Shi¹, Y. Zhao^1,4 (1.Nanjing Univ., 2.State Key Lab. of Functional Materials and Informatics, 3.Peter Grünberg Inst. 9, 4.State Key Lab. of Silicon Materials (China))

https://doi.org/10.7567/SSDM.2013.D-3-4