[D-7-2] CMOS-Compatible Mesa-Etched Ultrathin Epitaxial Channel Tunnel Field-Effect Transistors

Y. Morita¹、T. Mori¹、S. Migita¹、W. Mizubayashi¹、A. Tanabe¹、K. Fukuda¹、T. Matsukawa¹、K. Endo¹、S. O'uchi¹、Y.X. Liu¹、M. Masahara¹、H. Ota¹ (1.GNC, AIST (Japan))

https://doi.org/10.7567/SSDM.2013.D-7-2