[J-1-4] Au-Free Low Temperature Ohmic Contacts for AlGaN/GaN Power Devices on 200 mm Si Substrates

A. Firrincieli¹、B. De Jaeger¹、S. You¹、D. Wellekens¹、M. Van Hove¹、S. Decoutere¹ (1.imec (Belgium))

https://doi.org/10.7567/SSDM.2013.J-1-4