[M-2-2] 600 V-class Trench-Filling Super Junction MOSFET for High precision processing technology

Y. Oda¹、T. Yamamoto¹、K. Eguchi¹、Y. Kagata¹ (1.Denso Corp. (Japan))

https://doi.org/10.7567/SSDM.2013.M-2-2