Impurities distribution and recombination activity in as-grown and annealed multicrystalline silicon

T. Kojima; T. Tachibana; N. Kojima; Y. Ohshita; K. Arafune; A. Ogura; M. Yamaguchi

doi:https://doi.org/10.7567/SSDM.2013.N-6-2

2013 International Conference on Solid State Devices and Materials

Sep 24, 2013 - Sep 27, 2013
Hilton Fukuoka Sea Hawk, Fukuoka, Japan

[N-6-2] Impurities distribution and recombination activity in as-grown and annealed multicrystalline silicon

T. Kojima¹, T. Tachibana¹, N. Kojima¹, Y. Ohshita¹, K. Arafune², A. Ogura³, M. Yamaguchi¹ (1.Toyota Tech. Inst., 2.Univ. Hyogo, 3.Meiji Univ. (Japan))

https://doi.org/10.7567/SSDM.2013.N-6-2

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