[P-1-3] An Alternative Technique for GeOI Fabrication

C.T. Chung¹、G.L. Luo²、C.W. Chen¹、C.H. Chien^1,2 (1.National Chiao-Tung Univ.、2.National Nano Device Labs. (Taiwan))

https://doi.org/10.7567/SSDM.2013.P-1-3