[PS-1-1] Fabrication of Tri-Gated Junctionless Poly-Si Transistors with Photoresist Trimming Technique

C.I. Lin¹, K.H. Lee¹, C.L. Cheng¹, H.C. Lin^1,2, T.Y. Huang¹ (1.National Chiao Tung Univ., 2.National Nano Device Labs. (Taiwan))

https://doi.org/10.7567/SSDM.2013.PS-1-1