[PS-1-1] Fabrication of Tri-Gated Junctionless Poly-Si Transistors with Photoresist Trimming Technique

C.I. Lin¹、K.H. Lee¹、C.L. Cheng¹、H.C. Lin^1,2、T.Y. Huang¹ (1.National Chiao Tung Univ.、2.National Nano Device Labs. (Taiwan))

https://doi.org/10.7567/SSDM.2013.PS-1-1