[PS-12-15] Oxidized titanium nitride thin films in situ grown by pulsed laser deposition for diluted magnetic semiconductor

S.C. Chen², K.H. Wu², J.Y. Juang², T. Kobayashi², H.C. Kuo¹ (1.Chiao-Tung Univ., 2.Chiao-Tung Univ. (Taiwan))

https://doi.org/10.7567/SSDM.2013.PS-12-15