The Japan Society of Applied Physics

[PS-14-16L] Cell Pitch Design Limitation for Electrical and Thermal Characteristics in Super Junction MOSFET

J.M. Geum1、S.S. Kyoung1、E.S. Jung2、Y.T. Kim3、M.Y. Sung1 (1.Korea Univ.、2.Maple Semiconductor Inc.、3.Semiconductor Materials & Devices Lab., Korea Inst. of Sci. & Tech.(KIST) (Korea))

https://doi.org/10.7567/SSDM.2013.PS-14-16L