[PS-14-16L] Cell Pitch Design Limitation for Electrical and Thermal Characteristics in Super Junction MOSFET

J.M. Geum¹、S.S. Kyoung¹、E.S. Jung²、Y.T. Kim³、M.Y. Sung¹ (1.Korea Univ.、2.Maple Semiconductor Inc.、3.Semiconductor Materials & Devices Lab., Korea Inst. of Sci. & Tech.(KIST) (Korea))

https://doi.org/10.7567/SSDM.2013.PS-14-16L