[PS-14-9] Schottky Barrier Height Modulation of the Metal/4H-SiC Contact by Ultra-Thin Dielectric Insertion Technique

B.Y. Tsui¹、J.C. Cheng¹、L.S. Lee²、C.Y. Lee²、M.J. Tsai² (1.National Chiao Tung Univ.、2.Industrial Technology Research Institute (Taiwan))

https://doi.org/10.7567/SSDM.2013.PS-14-9