[PS-14-9] Schottky Barrier Height Modulation of the Metal/4H-SiC Contact by Ultra-Thin Dielectric Insertion Technique

B.Y. Tsui¹, J.C. Cheng¹, L.S. Lee², C.Y. Lee², M.J. Tsai² (1.National Chiao Tung Univ., 2.Industrial Technology Research Institute (Taiwan))

https://doi.org/10.7567/SSDM.2013.PS-14-9