[PS-2-4] Young Modulus of Si in 3D-LSIs and Reliability

M. Murugesan¹, J.C. Bea¹, T. Fukushima¹, K.W. Lee¹, T. Tanaka¹, M. Koyanagi¹ (1.Tohoku Univ. (Japan))

https://doi.org/10.7567/SSDM.2013.PS-2-4