[PS-2-4] Young Modulus of Si in 3D-LSIs and Reliability

M. Murugesan¹、J.C. Bea¹、T. Fukushima¹、K.W. Lee¹、T. Tanaka¹、M. Koyanagi¹ (1.Tohoku Univ. (Japan))

https://doi.org/10.7567/SSDM.2013.PS-2-4