[PS-3-16] Layout Design Considering Electro-thermal Properties for CMOS Inverter Composed of Multi-pillar Vertical MOSFET

A. Wang^1,2、T. Endoh^1,2 (1.Tohoku Univ.、2.JST-CREST (Japan))

https://doi.org/10.7567/SSDM.2013.PS-3-16