Effects of Rutile TiO<sub>2</sub> Interlayer on HfO<sub>2</sub>/Ge MOS Structure

2013 International Conference on Solid State Devices and Materials

Sep 24, 2013 - Sep 27, 2013
Hilton Fukuoka Sea Hawk, Fukuoka, Japan

K. Kobashi^1,2, T. Nagata², T. Nabatame², Y. Yamashita², A. Ogura¹, T. Chikyow² (1.Meiji Univ., 2.NIMS (Japan))