Extraction of Trapped Charge Profile in Space and Energy in P-Channel SONOS Memory Device

Y.Y. Chiu; B.J. Yang; F.H. Li; R.W. Chang; S.F. Ng; W.T. Sun; C.J. Hsu; C.W. Kuo; C.Y. Lo; R. Shirota

doi:https://doi.org/10.7567/SSDM.2013.PS-4-6L

[PS-4-6L] Extraction of Trapped Charge Profile in Space and Energy in P-Channel SONOS Memory Device

Y.Y. Chiu¹, B.J. Yang¹, F.H. Li¹, R.W. Chang¹, S.F. Ng¹, W.T. Sun², C.J. Hsu², C.W. Kuo², C.Y. Lo², R. Shirota¹ (1.National Chiao Tung Univ., 2.eMemory Tech. Inc. (Taiwan))

https://doi.org/10.7567/SSDM.2013.PS-4-6L

2013 International Conference on Solid State Devices and Materials

[PS-4-6L] Extraction of Trapped Charge Profile in Space and Energy in P-Channel SONOS Memory Device