[PS-6-21] High-performance Single/Dual-layer Channel IGZO TFT Fabricated on Glass Substrates at Low-temperature

Y. Tian¹、D.D. Han¹、S.M. Zhang^1,2、F.Q. Huang^1,2、D.F. Shan^1,2、Y.Y. Cong¹、J. Cai^1,2、L.L. Wang^1,2、S.D. Zhang^1,2、X. Zhang¹、Y. Wang¹ (1.Peking Univ.、2.Peking Univ. (China))

https://doi.org/10.7567/SSDM.2013.PS-6-21