[PS-6-21] High-performance Single/Dual-layer Channel IGZO TFT Fabricated on Glass Substrates at Low-temperature

Y. Tian¹, D.D. Han¹, S.M. Zhang^1,2, F.Q. Huang^1,2, D.F. Shan^1,2, Y.Y. Cong¹, J. Cai^1,2, L.L. Wang^1,2, S.D. Zhang^1,2, X. Zhang¹, Y. Wang¹ (1.Peking Univ., 2.Peking Univ. (China))

https://doi.org/10.7567/SSDM.2013.PS-6-21