Fabrication of Silicone Grating Using a Photoimprinted Polymer Mold and Period Control by Mechanical Distortion

T. Ishihara; I. Yamada; J. Yanagisawa; K. Koyama; T. Inoue; J. Nishii; M. Saito

doi:https://doi.org/10.7567/SSDM.2013.PS-7-15

[PS-7-15] Fabrication of Silicone Grating Using a Photoimprinted Polymer Mold and Period Control by Mechanical Distortion

T. Ishihara¹, I. Yamada¹, J. Yanagisawa¹, K. Koyama², T. Inoue², J. Nishii³, M. Saito² (1.Univ. of Shiga Prefecture, 2.Ryukoku Univ., 3.Hokkaido Univ. (Japan))

https://doi.org/10.7567/SSDM.2013.PS-7-15

2013 International Conference on Solid State Devices and Materials

[PS-7-15] Fabrication of Silicone Grating Using a Photoimprinted Polymer Mold and Period Control by Mechanical Distortion