The Japan Society of Applied Physics

[PS-7-15] Fabrication of Silicone Grating Using a Photoimprinted Polymer Mold and Period Control by Mechanical Distortion

T. Ishihara1、I. Yamada1、J. Yanagisawa1、K. Koyama2、T. Inoue2、J. Nishii3、M. Saito2 (1.Univ. of Shiga Prefecture、2.Ryukoku Univ.、3.Hokkaido Univ. (Japan))

https://doi.org/10.7567/SSDM.2013.PS-7-15