[A-9-3] Comparative Study of Floating Gate Type 3D Fin-Channel Flash Memories with Different Channel Shapes and Interpoly Dielectric Layers

Y.X. Liu¹, T. Nabatame², N. Nguyen², T. Matsukawa¹, K. Endo¹, S. O'uchi¹, J. Tsukada¹, H. Yamauchi¹, Y. Ishikawa¹, W. Mizubayashi¹, Y. Morita¹, S. Migita¹, H. Ota¹, T. Chikyow², M. Masahara¹ (1.AIST, 2.NIMS (Japan))

https://doi.org/10.7567/SSDM.2014.A-9-3