[A-9-3] Comparative Study of Floating Gate Type 3D Fin-Channel Flash Memories with Different Channel Shapes and Interpoly Dielectric Layers

Y.X. Liu¹、T. Nabatame²、N. Nguyen²、T. Matsukawa¹、K. Endo¹、S. O'uchi¹、J. Tsukada¹、H. Yamauchi¹、Y. Ishikawa¹、W. Mizubayashi¹、Y. Morita¹、S. Migita¹、H. Ota¹、T. Chikyow²、M. Masahara¹ (1.AIST、2.NIMS (Japan))

https://doi.org/10.7567/SSDM.2014.A-9-3