[C-9-2] Grain Growth Control by Micro-Thermal-Plasma-Jet Irradiation to Very Narrow Amorphous Silicon Strips and Its Application to Thin Film Transistors

S. Yamamoto¹, S. Morisaki¹, S. Hayashi¹, T. Nakatani¹, S. Higashi¹ (1.Hiroshima Univ. (Japan))

https://doi.org/10.7567/SSDM.2014.C-9-2