[C-9-2] Grain Growth Control by Micro-Thermal-Plasma-Jet Irradiation to Very Narrow Amorphous Silicon Strips and Its Application to Thin Film Transistors

S. Yamamoto¹、S. Morisaki¹、S. Hayashi¹、T. Nakatani¹、S. Higashi¹ (1.Hiroshima Univ. (Japan))

https://doi.org/10.7567/SSDM.2014.C-9-2