[E-7-2] A Novel Method for Fabrication of Sub-100nm IGZO TFTs

B.S. Shie¹, H.C. Lin^1,2, T.Y. Haung¹ (1.NCTU, 2.National Nano Device Labs. (Taiwan))

https://doi.org/10.7567/SSDM.2014.E-7-2