[E-7-4] Fabrication of IGZO Thin-Film Transistors with Film Profile Engineering

R.J. Lyu¹, H.C. Lin^1,2, T.Y. Huang¹ (1.NCTU, 2.National Nano Device Labs. (Taiwan))

https://doi.org/10.7567/SSDM.2014.E-7-4